| 摘要 |
PURPOSE: An LED device inspecting apparatus is provided to increase a device inspection speed by rapidly loading a wafer ring with devices. CONSTITUTION: An LED device inspecting apparatus includes a loading unit which loads a wafer ring and a device inspecting unit which inspects the device. A wafer ring(10) is vertically loaded on a wafer ring table(700) near the device inspecting unit. The wafer ring table includes a table part(720) with a gripping unit(710) and a table driving unit(730). A wafer ring transfer unit(900) withdraws a wafer ring from a wafer ring magazine part with a plurality of wafer rings and transfers the wafer ring to the wafer ring table. |
