| 发明名称 |
In-Ga-Zn-O-BASED OXIDE SINTERED BODY SPUTTERING TARGET WITH EXCELLENT STABILITY DURING LONG-TERM DEPOSITION |
| 摘要 |
<p>A sputtering target including an oxide sintered body including In, Zn and Ga, wherein a surface compound and an interior compound are essentially of the same crystal type(s).</p> |
| 申请公布号 |
EP2503019(A1) |
申请公布日期 |
2012.09.26 |
| 申请号 |
EP20100831337 |
申请日期 |
2010.11.18 |
| 申请人 |
IDEMITSU KOSAN CO., LTD. |
发明人 |
ITOSE, MASAYUKI;YANO, KOKI |
| 分类号 |
C23C14/34;C04B35/00;H01L21/363 |
主分类号 |
C23C14/34 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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