发明名称 DEPOSITION MASK
摘要 PURPOSE: A deposition mask is provided to easily remove the foreign material or washing residue between a mask frame and a mask sheet by injecting washing gas into a first connection path. CONSTITUTION: A deposition mask comprises a mask frame(110) and a mask sheet. The mask frame has an open window in the center and includes a first opening(112) and a second opening on the outer side and a first connection path(140) spatially connecting the first and second openings. The mask sheet is arranged on the mask frame so that one side of the mask frame faces the mask sheet and fixed with the mask sheet in a fixing zone. The first opening is located closer to the open window relative to the fixing zone.
申请公布号 KR20120105295(A) 申请公布日期 2012.09.25
申请号 KR20110023028 申请日期 2011.03.15
申请人 SAMSUNG DISPLAY CO., LTD. 发明人 LEE, SANG SHIN
分类号 C23C14/04;C23C14/24;H05B33/10 主分类号 C23C14/04
代理机构 代理人
主权项
地址