APPARATUS AND METHODS FOR TWO-DIMENSIONAL ION BEAM PROFILING,申请号KR20077011018-传众专利搜索

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发明名称	APPARATUS AND METHODS FOR TWO-DIMENSIONAL ION BEAM PROFILING
摘要
申请公布号	KR101185370(B1)	申请公布日期	2012.09.25
申请号	KR20077011018	申请日期	2005.11.03
申请人		发明人
分类号	H01J37/30;H01J37/302;H01J37/317;H01L21/265	主分类号	H01J37/30
代理机构		代理人
主权项
地址

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