CALIBRATION OF NON-VIBRATING CONTACT POTENTIAL DIFFERENCE MEASUREMENTS TO DETECT SURFACE VARIATIONS THAT ARE PERPENDICULAR TO THE DIRECTION OF SENSOR MOTION,申请号KR20107023566-传众专利搜索

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发明名称	CALIBRATION OF NON-VIBRATING CONTACT POTENTIAL DIFFERENCE MEASUREMENTS TO DETECT SURFACE VARIATIONS THAT ARE PERPENDICULAR TO THE DIRECTION OF SENSOR MOTION
摘要
申请公布号	KR101186072(B1)	申请公布日期	2012.09.25
申请号	KR20107023566	申请日期	2009.04.28
申请人		发明人
分类号	H01L21/66	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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