发明名称 OPTICAL DEVICE, METHOD FOR MANUFACTURING OPTICAL DEVICE, AND OPTICAL SCANNER
摘要 An optical device includes a base made of silicon and including a movable portion provided with a light reflecting portion having light reflectivity and capable of oscillating around a oscillation axis, at least one connection portion that extends from the movable portion, and a support portion that supports the connection portion, and a stray light suppression layer provided on a surface of the base and having a function of suppressing light reflection. In a plan view in which the base is viewed in a thickness direction thereof, the stray light suppression layer is provided on portions other than an edge of the connection portion, an edge that connects an edge of the movable portion to the edge of the connection portion, and an edge that connects an edge of the support portion to the edge of the connection portion.
申请公布号 US2012236384(A1) 申请公布日期 2012.09.20
申请号 US201213358815 申请日期 2012.01.26
申请人 MIZOGUCHI YASUSHI;SEIKO EPSON CORPORATION 发明人 MIZOGUCHI YASUSHI
分类号 G02B26/10;B29D11/00;G02B7/198 主分类号 G02B26/10
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