SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANSFER METHOD

摘要

PROBLEM TO BE SOLVED: To achieve wafer 14 transportation to a boat 30 by making a slot other than the slot for which transfer was inhibited hold the wafer 14 without transferring a substrate to the slot for which transfer was inhibited in wafer 14 transportation.

SOLUTION: A substrate processing apparatus comprises: a boat 30 which retains a wafer 14 in a mounting part; a pod 16 which arranges the wafer 14 in a plurality of slots; a substrate transfer device 28 composed so as to transport one or a plurality of wafers 14; and a controller 152 which selects and transfers the one or plurality of the wafers to the port 30 while retaining the one or plurality of the wafers in another mounting part other than the specific mounting part when a specific mounting part receives a transfer inhibition specification.

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