发明名称 TANTALUM CARBIDE-COATED CARBON MATERIAL AND MANUFACTURING METHOD FOR SAME
摘要 On the surface of a carbon substrate 41, a tantalum carbide coating film 42 is formed to coat the carbon substrate 41. The tantalum carbide coating film 42 has a maximum peak value of at least 80 degrees in an orientation angle of a (311) plane corresponding to a diffraction peak of tantalum carbide as determined by X-ray diffraction.
申请公布号 KR20120104260(A) 申请公布日期 2012.09.20
申请号 KR20127016273 申请日期 2010.12.28
申请人 TOYO TANSO CO., LTD. 发明人 KONDO MIKA
分类号 C23C16/32;C30B29/36;H01L21/205 主分类号 C23C16/32
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