发明名称 ENHANCEMENT-MODE HIGH-ELECTRON-MOBILITY TRANSISTOR AND THE MANUFACTURING METHOD THEREOF
摘要 This invention discloses an enhancement-mode high-electron-mobility transistor and the manufacturing method thereof. The transistor comprises an epitaxial buffer layer on a substrate, a source and drain formed in the buffer layer, a PN-junction stack formed on the buffer layer and located between the source and drain, and a gate formed on the PN-junction stack, wherein the PN-junction stack is composed of alternating layers of a P-type semiconductor and an N-type semiconductor.
申请公布号 US2012238064(A1) 申请公布日期 2012.09.20
申请号 US201213487711 申请日期 2012.06.04
申请人 CHANG EDWARD YI;CHANG CHIA-HUA;LIN YUEH-CHIN;NATIONAL CHIAO TUNG UNIVERSITY 发明人 CHANG EDWARD YI;CHANG CHIA-HUA;LIN YUEH-CHIN
分类号 H01L21/335 主分类号 H01L21/335
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