发明名称 |
CHARGED PARTICLE BEAM LENS AND EXPOSURE APPARATUS USING THE SAME |
摘要 |
<p>An electrostatic charged particle beam lens includes an electrode including a flat plate having a first surface having a normal line extending in a direction of an optical axis and a second surface opposite to the first surface, the electrode having a through-hole extending from the first surface to the second surface. When an opening cross section is defined as a cross section of the through-hole taken along a plane perpendicular to the normal line and a representative diameter is defined as a diameter of a circle obtained by performing regression analysis of the opening cross section, a representative diameter of the opening cross section in a first region that is on the first surface side and a representative diameter of the opening cross section in a second region that is on the second surface side are smaller than a representative diameter of the opening cross section in a third region that is a region in the electrode disposed between the first surface and the second surface.</p> |
申请公布号 |
WO2012124319(A1) |
申请公布日期 |
2012.09.20 |
申请号 |
WO2012JP01773 |
申请日期 |
2012.03.14 |
申请人 |
CANON KABUSHIKI KAISHA;KATO, TAKAHISA;SETOMOTO, YUTAKA |
发明人 |
KATO, TAKAHISA;SETOMOTO, YUTAKA |
分类号 |
H01J37/12 |
主分类号 |
H01J37/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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