TRANSPARENT GAS-BARRIER FILM, METHOD OF MANUFACTURING THE SAME, ORGANIC ELECTROLUMINESCENCE DEVICE, SOLAR BATTERY, AND THIN-FILM BATTERY

摘要

PROBLEM TO BE SOLVED: To provide a transparent gas-barrier film that has excellent gas-barrier properties even when made of a small number of layers, and to provide a method of efficiently manufacturing the transparent gas-barrier film with the excellent gas-barrier properties through the same formation process in the same vacuum chamber.

SOLUTION: The gas-barrier film has a transparent gas-barrier layer with the gas-barrier properties formed on a resin substrate. The transparent gas-barrier layer is a laminated transparent gas-barrier layer formed by laminating an inorganic layer and a carbon-containing layer. The inorganic layer is formed by an evaporation method using arc-discharge plasma, and contains at least either a metal or a semimetal and at least either oxygen or nitrogen. The carbon-containing layer is formed by the evaporation method using the arc-discharge plasma and contains at least either a metal or a semimetal and carbon.

COPYRIGHT: (C)2012,JPO&INPIT