| 摘要 |
<P>PROBLEM TO BE SOLVED: To adjust the height simply in a short time, in the re-assembly work of a levitation stage that can be disassembled. <P>SOLUTION: In a levitation stage 10 of a resist coating apparatus, a stage block SB<SB POS="POST">a</SB>on the outlet side is attached onto an independently transportable trestle FL<SB POS="POST">A</SB>through a large number of posts 18 and adjusters 20. Three intermediate stage blocks SB<SB POS="POST">b</SB>, SB<SB POS="POST">c</SB>, SB<SB POS="POST">d</SB>are attached onto an independently transportable trestle FL<SB POS="POST">B</SB>through a large number of posts 22, 24, 26 and adjusters 28, 30, 32. A stage block SB<SB POS="POST">e</SB>on the outlet side is attached onto an independently transportable trestle FL<SB POS="POST">C</SB>through a large number of posts 34 and adjusters 36. <P>COPYRIGHT: (C)2012,JPO&INPIT |
