| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a flow rate sensor provided with pressure sensors for measuring the dynamic pressure and the static pressure in a housing, which do not interfere to each other. <P>SOLUTION: A flow sensor comprises a first diaphragm 20a which receives pressure from a dynamic pressure inlet port facing the flow direction of a fluid; a second diaphragm 20b which receives pressure from a static pressure inlet port facing a direction approximately perpendicular to the flow direction of the fluid; a housing 12 which is provided with a first storage space 14 having the first diaphragm 20a and a second storage space 15 having the second diaphragm 20b; a first pressure sensitive element 40a which is provided with a pair of base parts supported by a pressure receiving surface of the first diaphragm 20a and a stationary portion 16 of the first storage space 14, and has a detection axis arranged in parallel with the pressure receiving surface; and a second pressure sensitive element 40b which is provided with a pair of base parts supported by a pressure receiving surface of the second diaphragm 20b and a stationary portion 18 of the second storage space 15, and has a detection axis arranged in parallel with the pressure receiving surface. <P>COPYRIGHT: (C)2012,JPO&INPIT |
