| 摘要 |
A foreign substance removal apparatus detects how large difference is generated between a time phase of a vibration detected when a bending vibration of an m-order vibration mode is excited at an optical low-pass filter 410, and a time phase of a vibration detected when a bending vibration of an (m+1)-order vibration mode is excited at the optical low-pass filter 410. Then, the foreign substance removal apparatus calculates main driving parameters for use in a main driving operation based on the detected time phase difference.
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