THIN FILM TRANSISTOR ARRAY PANEL AND MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A thin film transistor array panel and a manufacturing method thereof are provided to prevent changes of the features of a thin film transistor according to a manufacturing process, thereby obtaining a superior yield. CONSTITUTION: A gate insulating film(140) is arranged on a gate electrode. An oxide semiconductor(154) is arranged on the gate insulating film. The semiconductor comprises fluorine. A source electrode(173) and a drain electrode(175) are arranged on the oxide semiconductor. A pixel electrode(191) is connected to the drain electrode.