| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a sensor device manufacturing method and a sensor device which reduce an impact on sensor property in a manner that prevents a metal electrode of a sensor from corrosion due to high humidity of external air and protects a sensor from an occurrence of warpage due to a resin seal thereof. <P>SOLUTION: A sensor device manufacturing method includes the following steps of: arranging, on a substrate, a sensor having a fixed section, a movable section positioned inside the fixed section, a flexible section connecting the fixed section and the movable section, a plurality of metal electrodes, and a sensor cap which covers the movable section and the flexible section and exposes the metal electrodes; electrically connecting a plurality of the metal electrodes of the sensor and a plurality of terminals of the substrate with bonding wires; removing a top portion of the sensor cap so as to expose a portion of the bonding wires between the plurality of metal electrodes and the plurality of terminals; and covering, with resin, portions where the plurality of metal electrodes of the sensor and the bonding wires are connected. <P>COPYRIGHT: (C)2012,JPO&INPIT |
