VACUUM PUMP, VACUUM EXHAUST DEVICE, AND METHOD FOR OPERATING VACUUM PUMP

摘要

(Problem) Provided are a vacuum pump capable of providing stable exhausting operation without causing loss of step, as well as a vacuum exhaust device and a method for operating a vacuum pump. (Solution) A method for operating a vacuum pump comprising a rotor (21, 22), a drive motor (35), and a magnetic coupling (50) contrived so as to transfer rotational power of the drive motor to the rotor at a rotating torque not exceeding a first threshold (Th1), wherein the method comprises a step for detecting the load torque of the drive motor (35). The speed of the drive motor (35) is increased when the load torque does not exceed a second threshold (Th2) that is lower than the first threshold (Th1), and the speed of the drive motor (35) is reduced when the load torque exceeds the second threshold (Th2) but does not exceed the first threshold (Th1).