发明名称 |
COPPER OXIDE ETCHANT AND ETCHING METHOD USING SAME |
摘要 |
<p>In order to provide a copper oxide etchant and an etching method using the same capable of selectively etching exposure/non-exposure portions when laser light exposure is performed by using copper oxide as a thermal-reactive resist material, the copper oxide etchant for selectively etching copper oxides having different oxidation numbers in a copper oxide-containing layer containing the copper oxide as a main component contains at least a chelating agent or salts thereof.</p> |
申请公布号 |
KR20120104339(A) |
申请公布日期 |
2012.09.20 |
申请号 |
KR20127018236 |
申请日期 |
2011.01.14 |
申请人 |
ASAHI KASEI KABUSHIKI KAISHA |
发明人 |
NAKAGAWA NORIKIYO;NAKATA TAKUTO;MITAMURA YOSHIMICHI |
分类号 |
C09K13/06;G03F7/004;G03F7/32 |
主分类号 |
C09K13/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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