发明名称 Radiation detector
摘要 A method for detecting radiation. The radiation detector includes a plurality of Faraday cups. Each Faraday cup being provided with a cover. Each cover comprising a window arrangement through which the radiation may pass into the Faraday cup. The window arrangement of each cover being different for each Faraday cup. Each Faraday cup housing a target configured to emit photoelectrons if the radiation is incident upon the target.
申请公布号 US8269186(B2) 申请公布日期 2012.09.18
申请号 US201113331140 申请日期 2011.12.20
申请人 ROOIJAKKERS WILHELMUS JACOBUS MARIA;WEHRENS MARTIJN GERARD DOMINIQUE;ASML NETHERLANDS B.V. 发明人 ROOIJAKKERS WILHELMUS JACOBUS MARIA;WEHRENS MARTIJN GERARD DOMINIQUE
分类号 G01J1/42 主分类号 G01J1/42
代理机构 代理人
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