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发明名称
WAFER EDGE WHEEL WITH DRYING FUNCTION
摘要
申请公布号
KR101182618(B1)
申请公布日期
2012.09.14
申请号
KR20077007691
申请日期
2005.09.16
申请人
发明人
分类号
F26B7/00;F26B5/08;F26B13/30;F26B17/24
主分类号
F26B7/00
代理机构
代理人
主权项
地址
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