APPARATUS AND PROCESS FOR REFILLING A BUBBLER

摘要

A chemical vapour deposition process has a bubbler vapour that is recharged from time to time (1). The bubbler is charged with a fluid (3) through which a carrier gas is passed in bubble form. When the bubbler is filled to a minimum depth (4) an exact quantity of the fluid substance (3) is drawn from a reservoir (15) via an intermediate container (25) filled with an inert gas at a pressure P1. The reservoir is charged with an inert gas to a pressure (P2) that is greater than that of P1. The pressure differential drives a pre-determined quantity of the substance from the reservoir via a tube (17) holding inert gas at a pressure (P3) that is less than P2 to the intermediate container. An independent claim is also included for the method of recharging the chemical vapor deposition bubbler using the device.