发明名称 |
LASER FABRICATION SYSTEM AND METHOD |
摘要 |
A laser fabrication system for processing a sample comprises a laser, a controllable light processing unit and a microlens array in the optical path of the light output from light processing unit. Focusing optics generate a set of focal regions in a sample to be processed, one focal region associated with each microlens. This arrangement combines multiple focal spots in the sample with individual spot control. |
申请公布号 |
WO2012120280(A1) |
申请公布日期 |
2012.09.13 |
申请号 |
WO2012GB50462 |
申请日期 |
2012.03.01 |
申请人 |
ISIS INNOVATION LTD;BOOTH, MARTIN JAMES;SALTER, PATRICK STEPHEN |
发明人 |
BOOTH, MARTIN JAMES;SALTER, PATRICK STEPHEN |
分类号 |
B23K26/06;G03F7/20 |
主分类号 |
B23K26/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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