发明名称 CUTTING APPARATUS
摘要 <P>PROBLEM TO BE SOLVED: To provide a manual-type cutting apparatus with high workability. <P>SOLUTION: A cutting apparatus comprises a chuck table which holds an object to be worked, a cutting means having a cutting blade for cutting the object to be worked held by the chuck table, and a chuck table moving means which moves and positions the chuck table into a cutting area where the object to be worked is cut by the cutting blade and an attaching/detaching area where the object to be worked is attached to and detached from the chuck table. The cutting apparatus further comprises a partition plate for partitioning into the cutting area and the attaching/detaching area, and a partition plate moving means which moves the partition plate between an open position where the partition plate and the object to be worked are not brought into contact with each other while the object to be worked is cut by the cutting blade, and a block position where the cutting area and the attaching/detaching area are blocked when the chuck table is set at the attaching/detaching position. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012178511(A) 申请公布日期 2012.09.13
申请号 JP20110041559 申请日期 2011.02.28
申请人 DISCO ABRASIVE SYST LTD 发明人 INOUE TAKASHI;TSUSHIMA TAKAYUKI;KATO YUSUKE
分类号 H01L21/301 主分类号 H01L21/301
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