发明名称 |
PRODUCTION EFFICIENCY IMPROVING APPARATUS, PRODUCTION EFFICIENCY IMPROVING METHOD, AND COMPUTER PROGRAM |
摘要 |
<p>Provided is a production efficiency improving apparatus that can improve processing efficiency of objects to be processed. The production efficiency improving apparatus (1) is provided with: a first communicating means for communicating information with a plurality of processing apparatuses (2) that process objects to be processed; a second communicating means for communicating, with a conveyance system (3) comprising conveyance apparatuses (32) for conveying the objects to be processed between the plurality of processing apparatuses (2), control information related to the control of the conveyance apparatuses (32); a means for predicting, on the basis of information communicated by the first communicating means, the conveying timing at which the processing apparatus (2) that is the destination of the communication of information needs to send out processed objects, and the conveying timing at which the processing apparatus (2) that is the destination of the communication of information needs to bring in unprocessed objects; and a generating means for generating control information to be sent to the conveyance system (3) such that the conveyance apparatus (32) will arrive at the processing apparatus (2) that is the destination of the communication of information at the timing predicted by the means for predicting the conveying timing.</p> |
申请公布号 |
WO2012121378(A1) |
申请公布日期 |
2012.09.13 |
申请号 |
WO2012JP56144 |
申请日期 |
2012.03.09 |
申请人 |
TOKYO ELECTRON LIMITED;MURATA MACHINERY, LTD.;MA SOLUTIONS LIMITED;DAIFUKU CO., LTD.;ASAKAWA, TERUO;YAMAMOTO, MAKOTO;MACHIDA, AKIRA;KAWAGUCHI, MASAAKI |
发明人 |
ASAKAWA, TERUO;YAMAMOTO, MAKOTO;MACHIDA, AKIRA;KAWAGUCHI, MASAAKI |
分类号 |
G05B19/418;G05D1/02;H01L21/677 |
主分类号 |
G05B19/418 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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