发明名称 OPTICAL SYSTEM AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM USING THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To obtain stable laser light. <P>SOLUTION: An optical system used with a laser device 3 may include: a light condensation optical system having at least one focus point and condensing laser light output from the laser device 3; a beam splitter 100 disposed between the light condensation optical system and the at least one focus point of the light condensation optical system; and an optical sensor 110 disposed on a light path of the laser light split by the beam splitter 100. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012178534(A) 申请公布日期 2012.09.13
申请号 JP20110075397 申请日期 2011.03.30
申请人 GIGAPHOTON INC 发明人 MORIYA MASATO;IGARASHI YOSHIKAZU;WAKABAYASHI OSAMU
分类号 H01L21/027;H05G2/00 主分类号 H01L21/027
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