| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an atmospheric pressure plasma device which is capable of maximizing the occurrence of plasma, and controlling the density of the plasma. <P>SOLUTION: The atmospheric pressure plasma device comprises: a housing 10 having an inlet 11 for introducing a reactive gas formed therein; high-voltage electrodes 110 provided in a plurality of layers in the housing 10; a dielectric 120 covering each high-voltage electrode 110; a high-voltage-generating part operable to generate a high voltage and apply it to the high-voltage electrodes 110; grounding electrodes 130 disposed on two opposing sides of each dielectric 120 to be in contact therewith; and a control part operable to control the density of plasma generated by reaction. <P>COPYRIGHT: (C)2012,JPO&INPIT |
