| 摘要 |
[Objective] To reduce generation of silane coupling agent aggregates in nanoimprinting that includes a step of processing a surface of a substrate by coating the surface with a silane coupling agent. [Constitution] In a nanoimprinting method, a silane coupling agent (3) having 1 or 2 alkyl groups adjacent to an Si atom is coated on the surface of a substrate (2). A curable resin that includes one of isobornyl acrylate, ethylene glycol acrylate, and a silicone monomer compound is coated on the surface which is coated with the silane coupling agent (3) to form a curable resin film (4). A mold is pressed against the curable resin film (4) with a pattern of protrusions and recesses (13) facing the curable resin film (4). The curable resin film (4) is cured, then the mold (1) is separated from the cured resin film (4). |
