发明名称 |
FOCUS TEST MASK, FOCUS MEASURING METHOD, EXPOSURE APPARATUS, AND EXPOSURE METHOD |
摘要 |
A focus test reticle for measuring focus information includes an outer pattern. The outer pattern has a line pattern composed of a light shielding film extending in the Y direction, a phase shift portion provided on a side in the +X direction of the line pattern and formed to have a line width narrower than the line pattern, a transmitting portion provided on a side in the -X direction of the line pattern and formed to have a line width narrower than the line pattern, a transmitting portion provided on a side in the +X direction of the phase shift portion, and a phase shift portion provided on a side in the -X direction of the transmitting portion. Focus information of a projection optical system is measured at a high measuring reproducibility and a high measuring efficiency. |
申请公布号 |
EP2498129(A1) |
申请公布日期 |
2012.09.12 |
申请号 |
EP20100828318 |
申请日期 |
2010.11.04 |
申请人 |
NIKON CORPORATION |
发明人 |
HIRUKAWA SHIGERU;KONDO SHINJIRO |
分类号 |
G01B11/00;G03F1/00;G03F7/20;H01L21/027 |
主分类号 |
G01B11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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