| 摘要 |
<p>A method of manufacturing a piezoelectric ink jet device having a pressure chamber (16), a flexible membrane (18) delimiting the pressure chamber, a piezoelectric actuator (20) mounted on the membrane, and a rigid substrate (22) attached to the side of the membrane (18) carrying the actuator (20), characterised by comprising the steps of:
- preparing the piezoelectric actuator (20) with an electrode (32) on at least one side,
- attaching the actuator (20) with its electrode side to a carrier plate (80),
- bonding the rigid substrate (22) to the side of the carrier plate (80) carrying the actuator (20), and
- removing material (82) from the carrier plate (80) on the side opposite to the actuator (20) and leaving only a thin layer of the carrier plate which then forms the membrane (18).</p> |
