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发明名称
半导体元件的测试方法与系统
摘要
一种半导体元件的测试方法,系提供至少一半导体元件,而半导体元件上具有复数个单元,每个单元皆有各自单元状态;接着进行半导体元件的测试,根据测试结果定义半导体元件的边界单元,边界单元状态与预先设定值进行比较,决定是否发出讯息,用以提示操作人员可能有地图偏移的情形
申请公布号
TWI372432
申请公布日期
2012.09.11
申请号
TW096149075
申请日期
2007.12.20
申请人
京元电子股份有限公司 新竹市公道五路2段81号
发明人
李明聪
分类号
H01L21/66
主分类号
H01L21/66
代理机构
代理人
陈培道 新竹县竹东镇中兴路4段195号53馆219室;庄婷聿 新竹县竹东镇中兴路4段195号53馆219室
主权项
地址
新竹市公道五路2段81号
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