发明名称 Implementation of one or more optical waveguides in reduced optical material
摘要 One or more first portions of a reduced optical material wafer are covered with a masking layer that leaves uncovered one or more second portions of the reduced optical material wafer. The reduced optical material wafer is exposed to an oxidizing atmosphere to reverse a reduction of the one or more second portions of the reduced optical material wafer that makes the one or more second portions receptive for implementation of one or more optical waveguides.
申请公布号 US8265444(B2) 申请公布日期 2012.09.11
申请号 US20110930986 申请日期 2011.01.21
申请人 GEOSLING CHRISTINE;NORTHROP GRUMMAN GUIDANCE AND ELECTRONICS COMPANY, INC. 发明人 GEOSLING CHRISTINE
分类号 G02B6/10;G02B6/12;G02B6/134;H01L21/00 主分类号 G02B6/10
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