| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a physical quantity sensor which is not influenced by at least either one of linear acceleration or angle speed of axes other than a detection axis. <P>SOLUTION: A physical quantity sensor 10 comprises: a substrate; a first displacement portion 21 and a second displacement portion 31 which are disposed on a space plane surface on the substrate, and having rotation shafts 22 and 32; fixing electrode portions provided at positions opposing to the first displacement portion 21 and the second displacement portion 31 of the substrate; a supporting portion 40 for supporting the rotation shafts of the first displacement portion and the second displacement portion; a fixing portion 50 for supporting the supporting portion 40 through a spring portion 60; and a driving portion 70 for vibrating the supporting portion 40 in a vibrating direction. The first displacement portion and the second displacement portion can be displaced about the rotation shafts in a vertical direction to the space plane surface, and each of the rotation shafts is provided so as to shift from the gravity centers of the first displacement portion or the second displacement portion. The rotation shaft 22 of the first displacement portion 21 and the rotation shaft 32 of the second displacement portion 31 are shifted from the gravity centers in the opposite directions to each other. <P>COPYRIGHT: (C)2012,JPO&INPIT |
