| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an ozone concentration measurement device capable of obtaining a correct measurement value using a nitride-based deep ultraviolet semi-conductor element and eliminating damage to the device, since when a sample gas passing through a measurement cell moves a long transmission distance, ozone repeatedly irradiated during transmission by ultraviolet rays do not allow correct ozone concentration measurement. <P>SOLUTION: Suppression of re-ozonization and correct ozone concentration measurement can be realized by: using a solid light emitting element for emitting an ultraviolet ray including the wavelengths of 200 nm to 320 nm; providing a sample gas measurement part constituted by a gas emission part for inhaling the sample gas at a position opposed to a gas injection part for blowing the sample gas; providing a mechanism for instantaneously passing the sample gas; preventing disorder of the gas; and shortening a transmission period of time. <P>COPYRIGHT: (C)2012,JPO&INPIT |
