| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method which reduces scratches on striped electrode due to a spacer when a protective film is manufactured on the side part of semiconductor laser bar. <P>SOLUTION: The manufacturing method for a protective filter of a semiconductor laser element includes: a step of forming a striped electrode 18 and a bonding pad 20 on a semiconductor laminate structure 14; a bar formation step of forming a multiple of semiconductor laser bars 30 by cutting substrates; a step of arranging the multiple of laser bars 30 on a loading surface 40 so that side surfaces 30b of the multiple of semiconductor laser bars 30 are directed towards a normal direction of the loading surface 40 and arranging a spacer 42 between the semiconductor laser bars 30; and a step of forming a protective film 32 so as to cover the side face 30b of the multiple of the semiconductor laser bars 30. Prior to the bar formation step, a film-shaped structure 22 whose hight based on a principal surface 12a is higher than the striped electrode 18 is formed on each of multiple parts of the semiconductor laminate structure 14 that constitutes each of the multiple of the semiconductor laser bars 30. <P>COPYRIGHT: (C)2012,JPO&INPIT |
