| 摘要 |
[Problem] To obtain the following: a vaporizer in which a plurality of thin-film starting material solutions are stably and reliably carried reliably separated by a carrier gas within the main body of a dispersion unit, and vaporization of the plurality of thin-film starting material solutions is performed in a subsequent step in the vaporization unit; a center rod used in the vaporizer; and a method for vaporizing a material accompanied by a carrier gas. [Solution] Provided is a vaporizer in which a carrier gas inlet is formed in the direction of the central axis of the dispersion unit main body, a center rod (10) is inserted into the carrier gas inlet, and a gas pathway is formed by the space formed between the inner wall of the carrier gas inlet and the outer wall of the center rod, thin-film starting material supply members, which supply the thin-film starting material, are formed and disposed at a plurality of locations along the gas pathway of the dispersion unit main body. The vaporizer is characterized in that sealing members (11a, 11b) are disposed in the lengthwise direction of the center rod. |
