| 摘要 |
Provided is an Al alloy film for display devices, which has excellent heat resistance under high temperatures, low electric resistance (wiring resistance), and excellent corrosion resistance under alkaline environments. The present invention relates to an Al alloy film containing Ge (0.01-2.0 at.% ) and an X group element (Ta, Ti, Zr, Hf, W, Cr, Nb, Mo, Ir, Pt, Re, and/or Os), wherein, with regard to precipitates each containing Al, the X group element and Ge generated when a heat treatment at 450-600°C is carried out, the density of some of the precipitates which have equivalent circle diameters of 50 nm or more is controlled. |
