| 摘要 |
<P>PROBLEM TO BE SOLVED: To correctly recognize a wear state of a blade by precisely performing position detection of the blade, and achieve a compact apparatus. <P>SOLUTION: A dicing apparatus includes a rotary blade subjected to index feed in Y direction relative to a workpiece and cut feed in Z direction; and a workpiece machining table on which the workpiece is placed and cutting feed in X direction relative to the rotary blade is carried out. Cutting of the workpiece is carried out by the rotary blade. The dicing apparatus includes a blade position detector for detecting a front end position of the rotary blade, attached to the same support member as a spindle holding the rotary blade so that a detection section thereof is located at a position not interfering with the workpiece machining table even when it is driven, on the side opposite the rotary blade on the workpiece machining table. <P>COPYRIGHT: (C)2012,JPO&INPIT |
