| 摘要 |
<P>PROBLEM TO BE SOLVED: To perform highly accurate timing calibration when calibrating the timing of a plurality of drivers. <P>SOLUTION: A semiconductor testing device 2 including a plurality of drivers 10 for outputting signals to a DUT 1 includes a correction part 25 for correcting a calibration value for calibrating the timing of the drivers 10 based on first time T1 in which a waveform is changed when inputting signals from the drivers 10 to a reference comparator 6 for calibrating the timing of the drivers 10 and second time T2 in which a waveform of a signal on an output end of the driver 10 is changed. Thereby, the influence of waveform rounding due to transmission loss can be removed, a calibration value is corrected and driver's timing calibration can be highly accurately performed. <P>COPYRIGHT: (C)2012,JPO&INPIT |
