PROCESS FOR PRODUCING SEMICONDUCTOR DEVICE, INSULATING FILM FOR SEMICONDUCTOR DEVICE, AND APPARATUS FOR PRODUCING THE INSULATING FILM,申请号KR20097026331-传众专利搜索

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发明名称	PROCESS FOR PRODUCING SEMICONDUCTOR DEVICE, INSULATING FILM FOR SEMICONDUCTOR DEVICE, AND APPARATUS FOR PRODUCING THE INSULATING FILM
摘要
申请公布号	KR101180551(B1)	申请公布日期	2012.09.06
申请号	KR20097026331	申请日期	2008.06.13
申请人		发明人
分类号	H01L21/318;C23C14/12;H01L21/312	主分类号	H01L21/318
代理机构		代理人
主权项
地址

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