发明名称 SEMICONDUCTOR DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To manufacture a highly reliable semiconductor device by imparting stable electric characteristics to a transistor using an oxide semiconductor film. <P>SOLUTION: Carriers unintentionally occurring in an oxide semiconductor film can be reduced when a p-type oxide semiconductor material is contained in an n-type oxide semiconductor film. This is because an electron unintentionally occurring in the n-type oxide semiconductor film disappears due to recombination with a hole occurring in the p-type oxide semiconductor material. Accordingly, carriers unintentionally occurring in the oxide semiconductor film can be reduced. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012169612(A) 申请公布日期 2012.09.06
申请号 JP20120013833 申请日期 2012.01.26
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 SASAKI TOSHINARI;NODA KOSEI;ENDO YUTA
分类号 H01L29/786;C23C14/08 主分类号 H01L29/786
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