| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a contamination evaluation method capable of accurately evaluating a contamination state in a prescribed atmosphere. <P>SOLUTION: A contamination evaluation method: cleaves a substrate made of a cleavage substance with a surface mirror-finished after bringing the same in an atmosphere that a contamination state thereof is to be evaluated (a cleavage process); and after exposing a cleavage surface in the atmosphere while continuously keeping the cleavage surface therein for a prescribed period, detects a contamination evaluation substance by a surface analysis of the cleavage surface (a quantitative analysis process). Because the substrate made of the cleavage substance is cleaved after bringing the same in the atmosphere to be evaluated, the surface immediately after being cleaved is free from the contamination evaluation substance when exposed to the atmosphere. Thus, the contamination evaluation method enables only the contamination evaluation substance in the atmosphere attached to the cleaved surface to be detected by analyzing the same and is therefore capable of accurately evaluating a contamination state in the atmosphere. <P>COPYRIGHT: (C)2012,JPO&INPIT |
