摘要 |
The invention relates the movement of at least one movable means of an interferometer relative to the body of the interferometer. The system according to the invention, comprises at least two interferometer actuators, that can be operated individually, so that the at least two actuators are capable of moving the at least one movable means of the interferometer. When activating at least one of the at least two interferometer actuators the at least one movable means of the interferometer is moved with a minimum need for correcting for e.g. tilt. In a preferred configuration the system and the method according to the invention comprises three interferometer actuators that can be operated individually.
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