| 摘要 |
PURPOSE: A method of manufacturing photoelectric conversion module is provided to increase an array discord of an optical waveguide and an electrode pad by forming an optical waveguide core with use of a mask for an electrode pattern. CONSTITUTION: An optical polymer film is formed on upper and lower part of a photosensitive polymer(103) by laminating nonphotosensitive polymers(102). A metal substrate is laminated on the optical polymer film. An optical waveguide core(106) is formed on the optical polymer film by being exposed to the optic polymer film. A metal pad(108) is formed by removing a portion of the metal substrate pattern. A wall pad(107) is formed on the top of the metal pad. |
