| 摘要 |
PURPOSE: A semiconductor manufacturing device is provided to form a spraying unit of a line shape, thereby preventing a substrate from being damaged in a wet etching process. CONSTITUTION: A container(100) is composed of an internal container(120) and an external container(140). A substrate supporting unit(200) is comprised in the container. A solution spraying unit(300) is arranged in the lower part of the substrate supporting unit. The solution spraying unit comprises a body, a spraying line(340) being formed on the top of the body, and a solution supplying pipe. A solution supplying unit(400) supplies solution to the solution spraying unit.
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