发明名称 |
APPARATUS AND METHOD FOR PROVIDING ISOLATION BETWEEN COMPONENTS IN MICROFABRICATED DEVICES |
摘要 |
An apparatus and method for providing isolation between components in microfabricated devices is provided. In one embodiment, a microfabricated device comprises: a base layer; a microfabricated component; and a non-sacrificial aerogel layer in contact with the microfabricated component and supporting the microfabricated thermal component on the base layer. The non-sacrificial aerogel layer is positioned to provide at least one of thermal, electrical or acoustic isolation between the microfabricated thermal component and the base layer. |
申请公布号 |
US2012219760(A1) |
申请公布日期 |
2012.08.30 |
申请号 |
US201113036922 |
申请日期 |
2011.02.28 |
申请人 |
DETRY JAMES F.;CARLSON ROBERT J.;NORRIS PAMELA MARIE;LICHTENBERGER ARTHUR WESTON;MATTHEWS ROY;BAUER CASEY MARIE NABORS;BAUER MATTHEW LINTON;HONEYWELL INTERNATIONAL INC. |
发明人 |
DETRY JAMES F.;CARLSON ROBERT J.;NORRIS PAMELA MARIE;LICHTENBERGER ARTHUR WESTON;MATTHEWS ROY;BAUER CASEY MARIE NABORS;BAUER MATTHEW LINTON |
分类号 |
B32B3/26;F16F15/00;H05K7/00 |
主分类号 |
B32B3/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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