| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of an optical waveguide which can efficiently manufacture an optical waveguide having a refractive index distribution of a grated index type or similar to that at a low cost; an optical waveguide having a small transmission loss and high reliability; and an electronic apparatus equipped with the optical waveguide. <P>SOLUTION: A manufacturing method of an optical waveguide comprises a first step for forming a layer 910 containing a polymer 915; and a second step for forming a refractive index distribution in the layer 910 by irradiating the layer 910 with an active radiation beam 930, isomerizing or dimerizing a part of a chemical structure in the polymer 915. In the second step, at least either one of a cross-sectional shape of the beam 930 or an intensity distribution in the beam 930 is set so as to continuously decrease the integrated light amount of an active irradiation with separating from a part near a center line of a moving path of the beam 930. Therefore, the refraction index distribution of a grated index type is formed. <P>COPYRIGHT: (C)2012,JPO&INPIT |
