| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of an optical waveguide which can efficiently manufacture an optical waveguide having a refractive index distribution of a grated index type or similar to that at a low cost; an optical waveguide having a small transmission loss and high reliability; and an electronic apparatus equipped with the optical waveguide. <P>SOLUTION: A manufacturing method of an optical waveguide comprises a first step for forming a layer 910 containing a polymer 915; and a second step for forming a refractive index distribution in the layer 910 by irradiating the layer 910 with an active radiation beam 930, isomerizing or dimerizing a part of a chemical structure in the polymer 915 to change a refractive index. In the second step, an active radiation is projected through a mask 935 having a predetermined transmittance distribution, so as to continuously change the integrated light amount of the active radiation 930. Therefore, the refraction index distribution of a grated index type is formed. <P>COPYRIGHT: (C)2012,JPO&INPIT |
