| 摘要 |
<P>PROBLEM TO BE SOLVED: To actualize a method for preventing contamination and breakage in a contrast enhancing element in centering an optical element in a transmission electron microscope. <P>SOLUTION: Using a plurality of optical elements in a transmission electron microscope 500, an unscattered electron beam is adjusted to deflect to prevent incidence of the electron beam onto a contrast enhancing element 518 disposed in the diffraction plane. The electron beam is further adjusted to reversely deflect to return to the optical axis, in centering the optical elements. <P>COPYRIGHT: (C)2012,JPO&INPIT |
