PIEZOELECTRIC ACTUATOR INCLUDING DOUBLE PZT PIEZOELECTRIC LAYERS WITH DIFFERENT PERMITIVITIES AND ITS MANUFACTURING METHOD

摘要

In a piezoelectric actuator including a lower electrode layer, a first PZT piezoelectric layer having a first specific permittivity is formed on the lower electrode layer, and a second PZT piezoelectric layer having a second specific permittivity smaller than said first specific permittivity is formed on the first PZT piezoelectric layer.