| 发明名称 |
FLUORINATED SILAZANE RELEASE AGENTS IN NANOIMPRINT LITHOGRAPHY |
| 摘要 |
An imprint lithography release agent having general formula (1): where R1 represents H or CH3, n is an integer from 1 to 5, and m is an integer from 1 to 40. Fluorinated silazanes of general formula (1) can be used to form a release layer on an imprint lithography template, added to an imprint lithography resist, or both. |
| 申请公布号 |
US2012217676(A1) |
申请公布日期 |
2012.08.30 |
| 申请号 |
US201213404083 |
申请日期 |
2012.02.24 |
| 申请人 |
WILLSON CARLTON GRANT;OGAWA TSUYOSHI;LIN MICHAEL W.;HELLEBUSCH DANIEL J.;JACOBSSON B. MICHAEL;BELL WILLIAM K.;BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM |
发明人 |
WILLSON CARLTON GRANT;OGAWA TSUYOSHI;LIN MICHAEL W.;HELLEBUSCH DANIEL J.;JACOBSSON B. MICHAEL;BELL WILLIAM K. |
| 分类号 |
B29C59/02 |
主分类号 |
B29C59/02 |
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